Director - Miyagi Technology Development Center (Sendai, Japan), Sep. 2018 -
- Responsible for advanced process and hardware development of etching tool
Director - Tokyo Electron Taiwan ESBU (Hsinchu, TAIWAN), Sep. 2014 - Aug, 2018
- Responsible for research and development work of etching business in Taiwan.
- Develop manufacturable etching processes for leading-edge technology of logic device.
Director - Etch Product Development Dept. (Sendai, Japan), Nov. 2011 - Nov, 2013
- Responsible for process and product development in Logic MOL/BEOL etching for 22nm and beyond generation.
Sr. Manager - Etch Process Dept. (Albany, NY, US), May. 2007 - Jul. 2008
- Responsible for process development of FEOL and BEOL etch process for 22nm and beyond technology of IBM and alliance partner.
-Overviews of Tokyo Electron and Tokyo Electron Miyagi
-Etch Process Introduction
üWhere is etch used in chip flow?
üEtch Equipment Overviews